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专利名称：Method and apparatus for reducing
particulates in a plasma tool through steadystate flows
发明人：Michael S. Barnes,Dennis K. Coultas,John C.
Forster,John H. Keller,Thomas Wicker
申请号：US08/178386申请日：19931223公开号：US05518547A公开日：19960521
摘要：A method and apparatus for reducing particulates in a plasma tool using steadystate flows includes a device, operatively coupled to a housing in which an object to beprocessed is positioned, for generating a plasma flow adjacent the object toward apumping aperture. A pumping mechanism pumps a medium adjacent the object. Themedium supports the plasma and entrains particulates in the plasma away from theobject and out the pumping aperture. Magnetic fields, produced by multipole magnetsforming a ring cusp, are preferably used to produce the plasma flow which is directedradially away from the object to be processed. In a second embodiment, an array ofmagnets which form a line cusp is provided to produce an opening through which plasmawill flow.
申请人：INTERNATIONAL BUSINESS MACHINES CORPORATION
代理机构：Whitham, Curtis, Whitham & McGinn
代理人：Alison Mortinger
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