Method of measuring a leveling plane

专利名称：Method of measuring a leveling plane发明人：Shigeru Hirukawa,Eiji Takane申请号：US08/181463申请日：19940114公开号：US0790A公开日：19951212

摘要：In order to measure inclination of a leveling plane with respect to the bestimage forming plane rapidly at a high accuracy without using a special super-flat wafer,the images of five focus measuring marks are exposed on shot areas partially

overlapping with each other, on one hand, in a first exposure area when a focal position ismade to coincide with a first focal position by operating a leveling mechanism and, on theother hand, in each of exposure areas when the focal positions are changed gradually.The best focal position is obtained by using an average of the mark lengths of the imagesof the marks as the mark lengths of the images of marks of measuring points at theupper left corners of the focal positions.

申请人：NIKON CORPORATION

代理机构：Shapiro and Shapiro

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