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专利名称：Method for electronically imaging the
potential distribution in an electroniccomponent and arrangement forimplementing the method
发明人：Hans P. Feuerbaum申请号：US06/022493申请日：19790321公开号：US04223220A公开日：19800916
摘要：A method for electronically imaging the potential distribution in an electroniccomponent such as an integrated circuit in which the phase of the pulses of the primaryelectron beam is shifted by a time delay with respect to the potential distribution in thecomponent with a multiple of the frequency of the line deflection of the primary electronbeam on the component and a frequency synchronous therewith chosen as the frequencyof the time delay.
申请人：SIEMENS AKTIENGESELLSCHAFT
代理机构：Kenyon & Kenyon
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