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专利名称：MEMS ACTUATOR AND MEMS ACTUATED
SHUTTER MECHANISM
发明人：BRIAN ALBUS,EDWARD TANG申请号：US13187185申请日：20110720
公开号：US20130021656A1公开日：20130124
专利附图：
摘要：The present application generally describes several microelectromechanicalsystems (MEMS) including apparatuses, devices and systems configured for actuating amicrodevice such as a shutter for use in a mobile terminal camera. One preferred
embodiment described herein can include an apparatus including a curtain substantiallydisposed in a plane; an actuator mechanically connected to the curtain; and a voltagesupply electrically connected to the actuator such that in response to a predeterminedvoltage the actuator thermally expands and thereby causes displacement of the curtainwithin the plane.
申请人：BRIAN ALBUS,EDWARD TANG
地址：PLYMOUTH MI US,ANN ARBOR MI US
国籍：US,US
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