专利内容由知识产权出版社提供
专利名称：INSPECTION SYSTEM WITH SOURCE OF
RADIATION AND METHOD
发明人：Guillaume Jegou申请号：US16321194申请日：20170727
公开号：US20190219730A1公开日：20190718
专利附图：
摘要：In examples, it is disclosed an inspection system comprising: a secondary sourceof radiation configured to generate secondary electromagnetic radiation for inspectionof a load in response to being irradiated by primary electromagnetic radiation from a
primary generator of electromagnetic radiation; and one or more detectors configuredto detect radiation from the load after interaction with the secondary inspection beam.
申请人：SMITHS HEIMANN SAS
地址：Vitry Sur Seine FR
国籍：FR
更多信息请下载全文后查看
