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专利名称：Structure and process for sealing a
glass/silicon enclosure
发明人：THOMAS, ISABELLE,LEFORT, PIERRE OLIVIER申请号：EP91420257.7申请日：19910716公开号：EP0467810B1公开日：19950621
摘要：Structure for vacuum sealing of a closed cavity by anodic welding of the lowerperiphery of a glass sheet (11) against the upper periphery of a silicon sheet (12). Theglass sheet comprises, facing the cavity, an opening (21) passing through it and the siliconsheet comprises a paddle (22) arranged facing the opening. The paddle is integrallyattached to at least a part of the silicon sheet by at least one silicon strip (23) which issufficiently thin to be flexible.
申请人：SEXTANT AVIONIQUE,SEXTANT AVIONIQUE,SEXTANT AVIONIQUE
地址：FR
国籍：FR
代理机构：de Beaumont, Michel
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