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专利名称:Method of producing photoelectric
transducers
发明人:Shimomoto, Yasuharu,Tsukada,
Toshihisa,Sasano, Akira,Tanaka,
Yasuo,Yamamoto, Hideaki,Takasaki, Yukio
申请号:EP81301239申请日:19810323公开号:EP0036780A3公开日:19820804
专利附图:
摘要:In a method of producing a photoelectric transducer wherein a
photoconductive layer is formed on a substrate (200) having an irregular surface, bydeposition of the photoconductive layer in the atmosphere including at least plasma, thesubstrate is disposed above a first electrode (201) to which a second electrode (209) isopposed, and a negative potential is applied to the first electrode. This enables thephotoconductive layer to be formed without breaks pinholes etc. due to the irregularsurface of the substrate. It is thus possible to provide photoelectric transducers with asmall dark current.
申请人:Hitachi, Ltd.
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